Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits or systems. The technology for the fabrication of Micro and Nanoelectromechanical systems is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still nor fully developed. Here, we present an on-wafer, highly precise and rapid characterization method to measure the mechanical, electrical and electromechanical properties of piezoresistive cantilevers. The set-up is based on a combination of probe-card and atomic force microscopy (AFM) technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this set-up we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity RF=158 uV/nN, a noise of 5.8 uV (1Hz-1kHz) and a minimum detectable force (MDF) of 37 pN with a relative standard deviation of sigma=8%. This small value of sigma, together with a high fabrication yield >95%, validates our fabrication technology. The devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.This work has been supported by MICINN through projects TEC2011-23600 and NANOSELECT-CSD2007- 00041 (Consolider-Ingenio 2010 Programme).Peer reviewe

Design and synthesis of Aviram-Ratner-type dyads and rectification studies in Langmuir-Blodgett (LB) films

The design and synthesis of Aviram–Ratner-type molecular rectifiers, featuring an anilino-substituted extended tetracyanoquinodimethane (exTCNQ) acceptor, covalently linked by the σ-spacer bicyclo[2.2.2]octane (BCO) to a tetrathiafulvalene (TTF) donor moiety, are described. The rigid BCO spacer keeps the TTF donor and exTCNQ acceptor moieties apart, as demonstrated by X-ray analysis. The photophysical properties of the TTF-BCO-exTCNQ dyads were investigated by UV/Vis and EPR spectroscopy, electrochemical studies, and theoretical calculations. Langmuir–Blodgett films were prepared and used in the fabrication and electrical studies of junction devices. One dyad showed the asymmetric current–voltage (I–V) curve characteristic for rectification, unlike control compounds containing the TTF unit but not the exTCNQ moiety or comprising the exTCNQ acceptor moiety but lacking the donor TTF part, which both gave symmetric I–V curves. The direction of the observed rectification indicated that the preferred electron current flows from the exTCNQ acceptor to the TTF donor.This work was supported by the ERC Advanced grant no.246637 (“OPTELOMAC”) and the Swiss National Science Foundation (SNF). A.D.F.acknowledges the NSF-IRFP (USA) for a postdoctoral fellowship. S.M. and P.C. are grateful for financial assistance from Ministerio de Ciencia e Innovación from Spainin the framework of grants CTQ2012-33198 and CTQ2013-50187-EXP.Peer Reviewe

From an organometallic monolayer to an organic monolayer covered by metal nanoislands: A simple thermal protocol for the fabrication of the top contact electrode in molecular electronic devices

et al.In this contribution, a novel method for practical uses in the fabrication of the top contact electrode in a metal/organic monolayer/metal device is presented. The procedure involves the thermally induced decomposition of an organometallic compound, abbreviated as the TIDOC method. Monolayers incorporating the metal organic compounds (MOCs) [[4-{(4-carboxy)ethynyl}phenyl]ethynyl]-(triphenylphosphine)-gold, 1, or [1-isocyano-4-methoxybenzene]-[4-amino-phenylethynyl]-gold, 2, were annealed at moderate temperatures (1: 150 °C for 2h and 2: 100 °C for 2 h), resulting in cleavage of the Au-P or Au-C bond and reduction of Au(I) to Au(0) as metallic gold nanoparticles (GNPs). These particles are distributed on the surface of the film resulting in formation of metal/molecule/GNP sandwich structures. Electrical properties of these nascent devices were determined by recording I¿V curves with a conductive-AFM. The I¿V curves collected from these metal/organic monolayer/GNPs sandwich structures are typical of metal-molecule-metal junctions, with no low resistance traces characteristic of metallic short circuits observed over a wide range of set-point forces. The TIDOC method is therefore an effective procedure for the fabrication of molecular junctions for the emerging area of molecular electronics.Peer Reviewe

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

Highly sensitive conversion of motion into readable electrical signals is a crucial and challenging issue for nanomechanical resonators. Efficient transduction is particularly difficult to realize in devices of low dimensionality, such as beam resonators based on carbon nanotubes or silicon nanowires, where mechanical vibrations combine very high frequencies with miniscule amplitudes. Here we describe an enhanced piezoresistive transduction mechanism based on the asymmetry of the beam shape at rest. We show that this mechanism enables highly sensitive linear detection of the vibration of low-resistivity silicon beams without the need of exceptionally large piezoresistive coefficients. The general application of this effect is demonstrated by detecting multiple-order modes of silicon nanowire resonators made by either top-down or bottom-up fabrication methods. These results reveal a promising approach for practical applications of the simplest mechanical resonators, facilitating its manufacturability by very large-scale integration technologies. © 2014 Macmillan Publishers Limited. All rights reserved.This work was partially funded by the projects SNM (FP7-ICT-2011-8), FORCE-for-FUTURE (CSD2010-00024), ANEM (TEC2009-14517-C02-01), SGR-NANOFABRICACION (2009 SGR 265), SiNSoC (MAT2011-15159-E). M.S. acknowledges the FPU grant (Ref. AP2008-03849).Peer Reviewe

Nanomechanical properties of solvent cast polystyrene and poly(methyl methacrylate) polymer blends and self-assembled block copolymers

© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE). The nanomechanical properties of solvent-cast polymer thin films have been investigated using PeakForce™ Quantitative Nanomechanical Mapping. The samples consisted of films of polystyrene (PS) and poly(methyl methacrylate) (PMMA) obtained after the dewetting of toluene solution on a polymeric brush layer. Additionally, we have probed the mechanical properties of poly(styrene-b-methyl methacrylate) block copolymers (BCP) as randomly oriented thin films. The probed films have a critical thickness <50 nm and present features to be resolved <42 nm. The Young's modulus values obtained through several nanoindentation experiments present a good agreement with previous literature, suggesting that the PeakForce™ technique could be crucial for BCP investigations, e.g., as a predictor of the mechanical stability of the different phases.This work was partially funded by the projects SNM (FP7-ICT-2011-8) and FORCE-for-FUTURE (CSD2010-00024).Peer Reviewe

Fabricación del electrodo superior en dispositivos moleculares mediante la formación de enlaces covalentes σ C-Au

Resumen del póster presentado a la 6ª Jornada de Jóvenes Investigadores en Física y Química de Aragón celebrada en Zaragoza el 20 de noviembre de 2014.-- et al.Peer reviewe

Laser Fabrication of Polymer Ferroelectric Nanostructures for Nonvolatile Organic Memory Devices

8 pags.; 5 figs.© 2015 American Chemical Society. Polymer ferroelectric laser-induced periodic surface structures (LIPSS) have been prepared on ferroelectric thin films of a poly(vinylidene fluoride-trifluoroethylene) copolymer. Although this copolymer does not absorb light at the laser wavelength, LIPSS on the copolymer can be obtained by forming a bilayer with other light-absorbing polymers. The ferroelectric nature of the structured bilayer was proven by piezoresponse force microscopy measurements. Ferroelectric hysteresis was found on both the bilayer and the laser-structured bilayer. We show that it is possible to write ferroelectric information at the nanoscale. The laser-structured ferroelectric bilayer showed an increase in the information storage density of an order of magnitude, in comparison to the original bilayer.The authors gratefully acknowledge the financial support of the Spanish Ministry of Economy and Competitiveness (MINECO), through Contract Nos. MAT 2011-23455, MAT 2012- 33517, and CTQ 2013-43086-P. D.E.M. thanks CSIC for the tenure of JAE-Pre fellowship and Fondo Social Europeo (FSE) for cofinancing the JAE Program. A.R.R. and E.R. thank MINECO for the tenure of a FPI contract (BES-2013-062620) and a Ramón y Cajal contract (No. RYC-2011-08069), respectively.Peer Reviewe

Compact CMOS Current Conveyor for Integrated NEMS Resonators

Peer reviewe

In situ real-time characterization of block copolymer self-assembly processes by GISAXS

E-MRS Spring Meeting and Exhibit will be held in the Convention Centre of Strasbourg (France), from June 18 to 22 (2018). .--https://www.european-mrs.com/block-copolymer-self-assembly-fundamentals-and-applications-emr

Extracting Block Copolymer Dynamics from GISAXS

4th. International symposium on DSA.(2018)4th. International symposium on DSA. 11-13. November, 2F Pearl Room, Sapporo Park Hotel. Japan (2018) .-http://dsasymp.org/program.htm